Products and Services
New design of Novellus 200mm & 300mm pedestals
CRC design improves lifetime by 2X, eliminates vacuum failures which cause costly downtime
Design and manufacture of new ESCs
6” Versys JR-type doped alumina ESC needed for Lam etcher in LED manufacturing line.
155mm Coulombic alumina ESC needed for new solar-cell equipment.
AMAT Producer Etch ESC repair & refurbishment
Short lifetime and film issues on 300mm JR-type AlN ESC were improved with repair and refurbishment process development